Description
low-k technology
1. Motive of low-k materials,,2. Kinds of low-k materials,,3. Mechanism of low-k materials,,4. Study on porous SiO2 (Sol-gel),,5. Integration between low-k and Cu,,6. Conclusion
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. z POJT G. x D T. p n u @ |. p n u @ . p OJT .OJT
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