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1.Introduction,,2.Ultra-thin Oixde Preparation ,,3.Intrinsic Properties of Thermal Oxide and Characterization , ,4.Oxide Reliability, ,5.Limits of Oxide Scaling, ,6.High-k Dielectric Technology

1.Introduction,,2.Ultra-thin Oixde Preparation ,,3.Intrinsic Properties of Thermal Oxide and Characterization , ,4.Oxide Reliability, ,5.Limits of Oxide Scaling, ,6.High-k Dielectric Technology

1.Introduction,,2.Ultra-thin Oixde Preparation ,,3.Intrinsic Properties of Thermal Oxide and Characterization , ,4.Oxide Reliability, ,5.Limits of Oxide Scaling, ,6.High-k Dielectric Technology

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1.Introduction,,2.Lithographic Systems and Illumination ,,3.Resist Technology,,4.Modeling & Simulations,,5.Resolution Enhancement Technology,,6.Critical Issues and Solutions ,,7.Imaging the Future