1.Pinciple of CVD,,2.Metal-CVD,,3.PE-CVD,,4.HDP-CVD,,5.LP-CVD,,6.UHV-CVD

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1.Introduction,,2.Ultra-thin Oixde Preparation ,,3.Intrinsic Properties of Thermal Oxide and Characterization , ,4.Oxide Reliability, ,5.Limits of Oxide Scaling, ,6.High-k Dielectric Technology

1.Introduction,,2.Ultra-thin Oixde Preparation ,,3.Intrinsic Properties of Thermal Oxide and Characterization , ,4.Oxide Reliability, ,5.Limits of Oxide Scaling, ,6.High-k Dielectric Technology

1.Introduction,,2.Ultra-thin Oixde Preparation ,,3.Intrinsic Properties of Thermal Oxide and Characterization , ,4.Oxide Reliability, ,5.Limits of Oxide Scaling, ,6.High-k Dielectric Technology

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